Program.cs

using BenchmarkDotNet.Attributes;
using BenchmarkDotNet.Running;
using Microsoft.Extensions.DependencyInjection;
using Microsoft.Extensions.Logging;
using System;
using System.Linq;
using System.Threading.Tasks;

namespace ConsoleApp5
{
    class Program
    {
        static void Main(string[] args)
        {
            BenchmarkRunner.Run<LoggingBenchmark>();
        }
    }

    [MemoryDiagnoser]
    public class LoggingBenchmark
    {
        ILoggerFactory _factory;
        IServiceProvider _serviceProvider;

        [GlobalSetup]
        public void Setup()
        {
            _serviceProvider = new ServiceCollection()
                .AddLogging()
                .BuildServiceProvider();

            _factory = _serviceProvider.GetRequiredService<ILoggerFactory>();
        }

        [Benchmark]
        public ILogger<LoggingBenchmark> OneFromFactory() => _factory.CreateLogger<LoggingBenchmark>();

        [Benchmark]
        public ILogger<LoggingBenchmark> OneFromServiceProvider() => _serviceProvider.GetRequiredService<ILogger<LoggingBenchmark>>();

        [Benchmark]
        public ILogger<LoggingBenchmark>[] ManyFromFactory()
        {
            var loggers = new ILogger<LoggingBenchmark>[10];
            Parallel.For(0, loggers.Length, id => loggers[id] = _factory.CreateLogger<LoggingBenchmark>());
            return loggers;
        }

        [Benchmark]
        public ILogger<LoggingBenchmark>[] ManyFromServiceProvider()
        {
            var loggers = new ILogger<LoggingBenchmark>[10];
            Parallel.For(0, loggers.Length, id => loggers[id] = _serviceProvider.GetRequiredService<ILogger<LoggingBenchmark>>());
            return loggers;
        }
    }
}

Report.md

BenchmarkDotNet=v0.10.9, OS=Windows 10 Redstone 2 (10.0.15063)
Processor=Intel Core i5-4258U CPU 2.40GHz (Haswell), ProcessorCount=4
Frequency=2343749 Hz, Resolution=426.6668 ns, Timer=TSC
.NET Core SDK=2.0.0-preview2-006497
  [Host]     : .NET Core 1.1.2 (Framework 4.6.25211.01), 64bit RyuJIT
  DefaultJob : .NET Core 1.1.2 (Framework 4.6.25211.01), 64bit RyuJIT

Method	Mean	Error	StdDev	Gen 0	Gen 1	Allocated
OneFromFactory	236.8 ns	6.258 ns	6.147 ns	0.0153	-	24 B
OneFromServiceProvider	190.3 ns	1.569 ns	1.391 ns	-	-	0 B
ManyFromFactory	8,806.5 ns	30.477 ns	28.508 ns	1.3702	0.0153	1626 B
ManyFromServiceProvider	8,090.3 ns	54.212 ns	50.710 ns	1.1902	0.0153	1478 B